Tekinoroji yekucheka netsvina ndeimwe yenzira dzakakosha. Gasi rekucheka netsvina chinhu chakakosha mukugadzirwa kwema semiconductor uye chinhu chakakosha pakugadzira plasma. Kushanda kwaro kunokanganisa zvakananga kunaka uye mashandiro echigadzirwa chekupedzisira. Chinyorwa chino chinonyanya kutaura nezve magasi anoshandiswa zvakanyanya mukucheka netsvina.
Magasi anobva kuFluorine: akadai setetrafluoride kabhoni (CF4), hexafluoroethane (C2F6), trifluoromethane (CHF3) uye perfluoropropane (C3F8). Magasi aya anogona kugadzira fluoride inoputika zvakanaka painocheka silicon nesilicon compounds, zvichiita kuti zvinhu zvibviswe.
Magasi anobva kuchlorine: akadai sechlorine (Cl2),boron trichloride (BCl3)uye silicon tetrachloride (SiCl4). Magasi anobva kuchlorine anogona kupa ma chloride ions panguva yekuchekwa, izvo zvinobatsira kuvandudza mwero wekuchekwa uye kusarudza.
Magasi anobva kubromine: akadai sebromine (Br2) uye bromine iodide (IBr). Magasi anobva kubromine anogona kupa mashandiro ari nani ekucheka mune mamwe maitiro ekucheka, kunyanya pakucheka zvinhu zvakaoma zvakaita sesilicon carbide.
Magasi akavakirwa paNitrogen neokisijeni: akadai senitrogen trifluoride (NF3) neokisijeni (O2). Magasi aya anowanzo shandiswa kugadzirisa mamiriro ekuita mukuita kwekucheka kuti kunatsiridze kusarudzwa uye gwara rekucheka.
Magasi aya anowana kuchekwa kwakanyatsojeka kwechinhu kuburikidza nekusanganiswa kwekutsvedza kwemuviri uye maitiro emakemikari panguva yekucheka kweplasma. Sarudzo yegasi rekucheka inoenderana nerudzi rwechinhu chinofanira kuchekwa, zvinodiwa zvekusarudza kwekucheka, uye mwero wekucheka waunoda.
Nguva yekutumira: Kukadzi-08-2025
