Carbon Tetrafluoride (CF4)

Technical Parameters

Carbon tetrafluoride ihalogenated hydrocarbon ine kemikari formula CF4.Inogona kutaridzirwa sehalogenated hydrocarbon, halogenated methane, perfluorocarbon, kana sechinhu chisingaoneki.Carbon tetrafluoride igasi risina ruvara uye risinganhuhwi, risinganyunguriki mumvura, rinonyungudika mubenzene uye chloroform.Yakagadzikana pasi pekushisa kwakajairika uye kudzvanywa, dzivirira yakasimba oxidants, inopfuta kana inobvira zvinhu.Gasi risingabatiki, kumanikidzwa kwemukati kwemudziyo kuchawedzera kana kuine kupisa kwakanyanya, uye kune ngozi yekuputika uye kuputika.Yakagadzikana mumakemikari uye isingabatike.Chete mvura ammonia-sodium simbi reagent inogona kushanda pane tembiricha.Carbon tetrafluoride igasi rinokonzera greenhouse effect.Yakanyatsogadzikana, inogona kugara mumhepo kwenguva yakareba, uye ine simba guru regreenhouse gasi.Carbon tetrafluoride inoshandiswa muplasma etching process yeakasiyana akasanganiswa maseketi.Inoshandiswawo selaser gasi, uye inoshandiswa mune yakaderera-tembiricha refrigerants, solvents, lubricant, insulating zvinhu, uye inotonhorera ye infrared detectors.Ndiyo inonyanya kushandiswa plasma etching gasi muiyo microelectronics indasitiri.Iko kusanganiswa kwe tetrafluoromethane yakakwirira-kuchena gasi uye tetrafluoromethane yakakwirira-kuchena gasi uye yakakwirira-kuchena kweokisijeni.Inogona kushandiswa zvakanyanya musilicon, silicon dioxide, silicon nitride, uye phosphosilicate girazi.Iyo etching yezvinhu zvitete zvemufirimu zvakaita se tungsten uye tungsten zvakare inoshandiswa zvakanyanya mukuchenesa pamusoro pemidziyo yemagetsi, solar cell production, laser tekinoroji, yakaderera-tembiricha firiji, leak inspection, uye detergent mukudhindwa wedunhu kugadzirwa.Inoshandiswa seyakadzika-tembiricha refrigerant uye plasma yakaoma etching tekinoroji yemasekete akabatanidzwa.Chengetedzo yekuchengetedza: Chengetedza munzvimbo inotonhorera, inofefetera isingabatike gasi dura.Ramba kure nemoto nekupisa.Tembiricha yekuchengetera haifanirwe kudarika 30°C.Inofanirwa kuchengetwa zvakasiyana kubva nyore (zvinopisa) zvinopisa uye oxidants, uye kudzivirira zvakasanganiswa kuchengetedza.Nzvimbo yekuchengetera inofanirwa kunge yakashongedzerwa neyakadonha yekurapa emergency emergency.

Application:

① Refrigerant:

Tetrafluoromethane dzimwe nguva inoshandiswa seyakadzika tembiricha refrigerant.

② Etching:

Inoshandiswa mumagetsi microfabrication chete kana musanganiswa neokisijeni seplasma etchant yesilicon, silicon dioxide, uye silicon nitride.

Normal package:

Advantage:

①Kuchena kwepamusoro, nzvimbo yazvino;

②ISO mugadziri wechitupa;

③Kutumirwa nekukurumidza;

④On-line yekuongorora system yekutonga kwemhando mumatanho ese;

⑤Chinodiwa chepamusoro uye hunyanzvi hwekubata silinda isati yazadza;