Electronicchaiwo magasiibazi rinokosha remagasi anokosha. Iwo anopinda angangoita ese chinongedzo chekugadzira semiconductor uye anokosha zviwanikwa zvekugadzira maindasitiri emagetsi akadai seakanyanya-makuru-akabatanidzwa maseketi, flat panel kuratidza zvishandiso, uye maseru ezuva.

Mu semiconductor tekinoroji, fluorine-ine magasi anoshandiswa zvakanyanya. Parizvino, mumusika wepasi rose wemagetsi gasi, fluorine-ine emagetsi magasi anoita inosvika makumi matatu muzana ehuwandu. Fluorine-ine emagetsi magasi chinhu chakakosha chemagetsi emagetsi gasi mumunda wemagetsi eruzivo zvinhu. Iwo anonyanya kushandiswa sekuchenesa uye etching agents, uye anogonawo kushandiswa se dopants, film-forming materials, etc. Muchinyorwa chino, munyori achakutora kuti unzwisise zvakajairika fluorine-ine magasi.

Izvi zvinotevera zvinowanzoshandiswa fluorine-containing magasi

Nitrogen trifluoride (NF3): Gasi rinoshandiswa kuchenesa nekubvisa madhipoziti, rinowanzoshandiswa kuchenesa makamuri ekuita uye nzvimbo dzemidziyo.

Sulfur hexafluoride (SF6): Fluorinating agent inoshandiswa mu oxide deposition process uye se insulating gasi yekuzadza insulating media.

Hydrogen fluoride (HF): Inoshandiswa kubvisa okisidhi kubva pasilicon pamusoro uye sechinhu chinonamira chekuisa silicon nezvimwe zvinhu.

Nitrogen fluoride (NF): Inoshandiswa kuisa zvinhu zvakaita sesilicon nitride (SiN) uye aluminium nitride (AlN).

Trifluoromethane (CHF3) uyetetrafluoromethane (CF4): Inoshandiswa kuisa fluoride zvinhu zvakaita sesilicon fluoride uye aluminium fluoride.

Nekudaro, magasi ane fluorine ane dzimwe njodzi, kusanganisira muchetura, corrosiveness, uye kupisa.

Muchetura

Mamwe magasi ane fluorine ane muchetura, senge hydrogen fluoride (HF), ane mhute inogumbura zvakanyanya ganda uye nzira yekufema uye inokuvadza kuhutano hwevanhu.

Corrosiveness

Hydrogen fluoride uye mamwe mafluorides ane ngura zvakanyanya uye anogona kukonzera kukuvara kwakanyanya paganda, maziso uye nzira yekufema.

Kupisa moto

Mamwe mafluoride anogona kupfuta uye anopindirana neokisijeni kana mvura iri mumhepo kuburitsa kupisa kwakanyanya uye magasi ane muchetura, anogona kukonzera moto kana kuputika.

High-pressure ngozi

Mamwe magasi efluorinated anoputika pasi pekumanikidzwa kwakanyanya uye anoda kutarisirwa kwakanyanya kana akashandiswa nekuchengetwa.

Impact pane zvakatipoteredza

Magasi ane fluorine ane hupenyu hwepamusoro hwemuchadenga uye maitiro eGWP, ayo ane mhedzisiro inoparadza pamhepo ozone layer uye anogona kukonzera kudziya kwepasi uye kusvibiswa kwezvakatipoteredza.

Kushandiswa kwemagasi munzvimbo dziri kusimukira dzakaita sezvemagetsi kuri kuramba kuchidzika, zvichiunza huwandu hukuru hwekuda kutsva kwemagasi emaindasitiri. Zvichienderana nehuwandu hwehuwandu hwekugadzira hutsva hwezvinhu zvikuru zvemagetsi semiconductors uye mapaneru ekuratidzira munyika yeChina mumakore mashoma anotevera, pamwe nekudiwa kwakasimba kwekuunza kunze kwenyika kwemagetsi emakemikari zvinhu, indasitiri yemagetsi gasi yemagetsi ichaunza. mwero wekukura wakakwira.