Yakajairika fluorine-ine yakakosha emagetsi magasi anosanganisirasulfur hexafluoride (SF6), tungsten hexafluoride (WF6),kabhoni tetrafluoride (CF4), trifluoromethane (CHF3), nitrogen trifluoride (NF3), hexafluoroethane (C2F6) uye octafluoropropane (C3F8).
Nekuvandudzwa kwenanotechnology uye kukura kukuru kweindasitiri yemagetsi, kudiwa kwayo kuchawedzera zuva nezuva. Nitrogen trifluoride, seyakakosha uye yakakura-inoshandiswa yakakosha gasi remagetsi mukugadzira uye kugadzirisa mapaneru uye semiconductors, ine nzvimbo yakakura yemusika.
Semhando yefluorine-ine yakakosha gasi,nitrogen trifluoride (NF3)ndicho chigadzirwa chemagetsi chakakosha gasi chine musika mukuru. Iyo ine makemikari inert pane yekamuri tembiricha, inoshanda kupfuura okisijeni pakupisa kwakanyanya, yakagadzikana kupfuura fluorine, uye iri nyore kubata. Nitrogen trifluoride inonyanya kushandiswa se plasma etching gasi uye reaction chamber yekuchenesa agent, uye inokodzera minda yekugadzira semiconductor machipisi, flat panel anoratidza, optical fibers, photovoltaic masero, nezvimwe.
Kuenzaniswa nemamwe magasi emagetsi ane fluorine,nitrogen trifluorideine zvakanakira kukurumidza kuita uye kushanda kwakanyanya. Kunyanya mukumisikidzwa kwesilicon-ine zvinhu zvakaita sesilicon nitride, ine yakakwira etching rate uye selectivity, ichisiya pasina chakasara pamusoro pechinhu chakavharirwa. Iyo zvakare yakanaka kwazvo yekuchenesa mumiriri uye haina kusvibiswa kumusoro, iyo inogona kusangana nezvinodiwa zvekugadzirisa maitiro.
Nguva yekutumira: Sep-14-2024
