Gasi remagetsi rinoshandiswa zvakanyanya - nitrogen trifluoride

Magasi emagetsi akajairika ane fluorine anosanganisirasarufa hexafluoride (SF6), tungsten hexafluoride (WF6),tetrafluoride kabhoni (CF4), trifluoromethane (CHF3), nitrogen trifluoride (NF3), hexafluoroethane (C2F6) uye octafluoropropane (C3F8).

Nekuvandudzwa kwe nanotechnology uye kukura kukuru kweindasitiri yezvemagetsi, kudiwa kwayo kuchawedzera zuva nezuva. Nitrogen trifluoride, segasi remagetsi rinonyanya kukosha uye rinoshandiswa zvakanyanya mukugadzirwa nekugadzirisa mapaneru nema semiconductors, rine nzvimbo yakakura yemusika.

Semhando yegesi yakakosha ine fluorine,nitrogen trifluoride (NF3)ndiyo gasi remagetsi rine simba guru pamusika. Rinoshaikwa nemakemikari patembiricha yemumba, rinoshanda kupfuura oxygen patembiricha yepamusoro, rakagadzikana kupfuura fluorine, uye riri nyore kubata. Nitrogen trifluoride inonyanya kushandiswa segasi replasma etching uye semushonga wekuchenesa mukamuri re reaction, uye rakakodzera minda yekugadzira semiconductor chips, flat panel displays, optical fibers, photovoltaic cells, nezvimwewo.

Zvichienzaniswa nemamwe magasi emagetsi ane fluorine,nitrogen trifluorideine zvakanakira zvekukurumidza kuita uye kushanda zvakanaka. Kunyanya pakuchekwa kwezvinhu zvine silicon zvakaita sesilicon nitride, ine mwero wepamusoro wekuchekwa uye kusarudza, isingasiyi masara pamusoro pechinhu chakachekwa. Imushonga wakanaka kwazvo wekuchenesa uye haina kusvibiswa pamusoro, izvo zvinogona kusangana nezvinodiwa nemaitiro ekugadzirisa.


Nguva yekutumira: Gunyana-14-2024