Huwandu Hwakanyanya hweGasi Rakakosha reElectronic - Nitrogen Trifluoride NF3

Indasitiri yemagetsi e semiconductor nenyika yedu inochengetedza hupfumi hwepamusoro. Nitrogen trifluoride, segasi remagetsi risingakoshi uye rakakura kwazvo mukugadzirwa nekugadzirisa mapaneru nema semiconductor, ine nzvimbo yakakura yemusika.

Magasi emagetsi anoshandiswa zvakanyanya ane fluorine anosanganisirasarufa hexafluoride (SF6), tungsten hexafluoride (WF6),tetrafluoride kabhoni (CF4), trifluoromethane (CHF3), nitrogen trifluoride (NF3), hexafluoroethane (C2F6) uye octafluoropropane (C3F8). Nitrogen trifluoride (NF3) inonyanya kushandiswa senzvimbo yefluorine yehydrogen fluoride-fluoride gas high-energy chemical lasers. Chikamu chinoshanda (inenge 25%) chesimba rekuita pakati peH2-O2 neF2 chinogona kuburitswa nemwaranzi yelaser, saka ma HF-OF lasers ndiwo ma laser anovimbisa zvikuru pakati pema laser emakemikari.

Nitrogen trifluoride igesi rinocheka plasma rakanaka kwazvo muindasitiri ye microelectronics. Pakucheka silicon nesilicon nitride, nitrogen trifluoride ine mwero wepamusoro wekucheka uye kusarudza kupfuura carbon tetrafluoride uye musanganiswa wecarbon tetrafluoride neokisijeni, uye haina kusvibiswa pamusoro. Kunyanya mukucheka zvinhu zvemaseketi akabatanidzwa zvine ukobvu husingasviki 1.5um, nitrogen trifluoride ine mwero wepamusoro wekucheka uye kusarudza, isingasiyi masara pamusoro pechinhu chakacheka, uye zvakare imushonga wakanaka wekuchenesa. Nekuvandudzwa kwe nanotechnology uye kukura kukuru kweindasitiri yemagetsi, kudiwa kwayo kuchawedzera zuva nezuva.

Semhando yegasi rakakosha rine fluorine, nitrogen trifluoride (NF3) ndiyo gasi rakakosha kwazvo remagetsi riri pamusika. Harina chemikemikari patembiricha yemumba, rinoshanda kupfuura okisijeni, rakagadzikana kupfuura fluorine, uye riri nyore kubata patembiricha yakakwira.

Nitrogen trifluoride inonyanya kushandiswa segasi rinocheka plasma uye semushonga wekuchenesa makamuri ekuita reaction, yakakodzera kuminda yekugadzira senge semiconductor chips, flat panel displays, optical fibers, photovoltaic cells, nezvimwewo.

Kana ichienzaniswa nemamwe magasi emagetsi ane fluorine, nitrogen trifluoride ine zvakanakira zvekukurumidza kuita uye kushanda zvakanaka, kunyanya mukucheka zvinhu zvine silicon zvakaita sesilicon nitride, ine mwero wekucheka wakakwira uye sarudzo, isingasiyi masara pamusoro pechinhu chakachekwa, uye zvakare imushonga wakanaka kwazvo wekuchenesa, uye haisvibisi pamusoro uye inogona kusangana nezvinodiwa nemaitiro ekugadzirisa.