Huwandu hukuru hwemagetsi akakosha gasi - Nitrogen Trifluoridi NF3

Yedu yenyika semiconductor Indasitiri uye Indasitiri Inisitiri inochengetedza yakakwirira chikamu chebudiriro. Nitrogen Trifluoride, seyakavimbika uye yakakura-vhoriyamu yakakosha yemagetsi gasi mukugadzirwa uye kugadzirwa kwemapaneru uye semiconducductors, ine nzvimbo yakafara yemusika.

Inowanzo shandiswa fluorine-ine magasi akasarudzika emagetsi anosanganisiraSulfur Hexfluoride (SF6), tungsten hexafluoride (WF6),carbon tetrafluoride (cf4), trifluoromethane (CHF3), nitrogen trifluoride (NF3), hexafluoroethane (C2F6) and octafluoropropane (C3F8). Nitrogen Trifluoride (NF3) Inonyanya kushandiswa seye Fluorine sosi yehydrogen fluoride-fluoride gasi yakakwira-simba emakemikari. Chikamu chinoshanda (chinenge 25%) chezvakaitwa simba pakati peH2-O2 uye F2 inogona kusunungurwa radiation, saka hf-ye lasers ndivo vanonyanya kuvimbisa laser lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers lasers.

Nitrogen Trifluoridi yakanakisa plasma etching gasi mune iyo micreilelectronics indasitiri. Kwemakumi mairi Silishon niticon nitride, nitrogen trifrudi ane chiyero chepamusoro uye kusarudza kupfuura kabhoni tetrafluoriori uye oksijeni, uye haina kusvibiswa pamusoro. Kunyanya muEtching yezvinhu zvakabatanidzwa nehurongwa hwakaderera pane 1.5um, nitrogen trifluori rateketi uye kusarudzika, kusiya zvakasara pamusoro pechinhu chechinhu, uye zvakare yakanyanya kuchenesa mumiriri. Nekuvandudzwa kweNanotechnology uye kukura kwakakura kweindasitiri yemagetsi, kudiwa kwayo kunowedzera zuva nezuva.

Semhando yemhando yeFluorine-ine yakakosha gasi, nitrogen trifluoride (NF3) ndiyo yakakura kwazvo yemagetsi yakakosha gasi chigadzirwa mumusika. Iyo yemakemikari inert pamhepo tembiricha, inoshingairira pane oksijeni, yakagadzikana kupfuura fluorine, uye nyore kubata tembiricha yakanyanya.

Nitrogen Trifluori inoshandiswa sePlasma etching Gasi uye kuitisa minda yekugadzira yakadai seyememiconductor Chips, Flatical Panel Inoratidza, Flatical Fils, PhotoVoltaic Fibles, etavoc masero, nezvimwe.

Zvichienzaniswa nedzimwe dzine mamwe magedhi emagetsi, Nitrogen Trifronide ine zvakanakira kuita silicon-zvine mwero wechigadzirwa maitiro ekugadzirisa.