Chiyero Chikuru cheElectronics Special Gas - Nitrogen Trifluoride NF3

Nyika yedu semiconductor indasitiri uye mapaneru indasitiri inochengetedza yakakwira mwero webudiriro. Nitrogen trifluoride, seyakakosha uye yakakura-vhoriyamu yakakosha gasi remagetsi mukugadzira uye kugadzirisa mapaneru uye semiconductors, ine nzvimbo yakakura yemusika.

Inowanzo shandiswa fluorine-ine yakakosha emagetsi magasi anosanganisirasulfur hexafluoride (SF6), tungsten hexafluoride (WF6),kabhoni tetrafluoride (CF4), trifluoromethane (CHF3), nitrogen trifluoride (NF3), hexafluoroethane (C2F6) uye octafluoropropane (C3F8). Nitrogen trifluoride (NF3) inonyanya kushandiswa sefluorine sosi yehydrogen fluoride-fluoride gasi yakakwira-simba kemikari lasers. Chikamu chinoshanda (chinenge 25%) chesimba rekuita pakati peH2-O2 neF2 inogona kuburitswa nemwaranzi yelaser, saka HF-OF lasers ndiyo inonyanya kuvimbisa lasers pakati pemakemikari lasers.

Nitrogen trifluoride yakanakisa plasma etching gasi muiyo microelectronics indasitiri. Kune etching silicon nesilicon nitride, nitrogen trifluoride ine yakakwira etching rate uye selectivity pane kabhoni tetrafluoride uye musanganiswa wecarbon tetrafluoride uye oxygen, uye haina kusvibiswa pamusoro. Kunyanya mukumisikidzwa kwezvinhu zvakabatanidzwa zvedunhu zvine hukobvu husingasviki 1.5um, nitrogen trifluoride ine yakanakisa etching mwero uye sarudzo, isingasiye yakasara pamusoro pechinhu chakatemwa, uye zvakare yakanaka kwazvo yekuchenesa mumiriri. Nekuvandudzwa kwenanotechnology uye kukura kukuru kweindasitiri yemagetsi, kudiwa kwayo kuchawedzera zuva nezuva.

Semhando yefluorine-ine yakakosha gasi, nitrogen trifluoride (NF3) ndiyo hombe yemagetsi yakakosha gasi chigadzirwa pamusika. Iyo ine makemikari inert pane yekamuri tembiricha, inoshanda zvakanyanya kupfuura oxygen, yakagadzikana kupfuura fluorine, uye iri nyore kubata pakupisa kwakanyanya.

Nitrogen trifluoride inonyanya kushandiswa seplasma etching gasi uye reaction chamber yekuchenesa mumiriri, yakakodzera minda yekugadzira semiconductor machipisi, flat panel inoratidzira, optical fibers, photovoltaic masero, nezvimwe.

Kuenzaniswa nemamwe magasi emagetsi ane fluorine, nitrogen trifluoride ine mabhenefiti ekukurumidza kuita uye kushanda kwakanyanya, kunyanya mukumisikidza kwesilicon-ine zvinhu zvakaita sesilicon nitride, ine yakanyanya etching rate uye selectivity, isingasiyi zvakasara pamusoro pechinhu chakaiswa, uye zvakare yakanaka kwazvo yekuchenesa mumiriri, uye haina kusvibiswa kwepamusoro pekugadzirisa.