Mukugadzira maitiro e semiconductor wafer foundries ane akanyanya kugadzirwa maitiro, anoda kusvika makumi mashanu marudzi akasiyana emagasi anodiwa. Magasi anowanzo kupatsanurwa kuita gasi zhinji uyechaiwo magasi.

Kushandiswa kwemagasi mumakroelectronics uye semiconductor maindasitiri Kushandiswa kwemagasi kwagara kuchiita basa rakakosha mune semiconductor maitiro, kunyanya semiconductor maitiro anoshandiswa zvakanyanya mumaindasitiri akasiyana. Kubva kuULSI, TFT-LCD kusvika kune yazvino micro-electromechanical (MEMS) indasitiri, semiconductor maitiro anoshandiswa semichina yekugadzira zvigadzirwa, kusanganisira yakaoma etching, oxidation, ion implantation, nhete firimu deposition, nezvimwe.

Semuenzaniso, vanhu vazhinji vanoziva kuti machipisi anogadzirwa nejecha, asi kutarisa maitiro ese ekugadzira chip, zvimwe zvinhu zvinodikanwa, senge photoresist, polishing fluid, inotangwa zvinhu, yakakosha gasi, nezvimwe. Kumashure-kumashure kurongedza kunodawo substrates, interposer, lead frames, bonding zvinhu, nezvimwe zvezvinhu zvakasiyana. Magetsi akakosha magasi ndiyo yechipiri yakakura zvinhu mumitengo yekugadzira semiconductor mushure mesilicon wafers, inoteverwa nemasiki uye photoresists.

Kuchena kwegasi kune simba rakasimba pakuita kwechikamu uye goho rechigadzirwa, uye kuchengetedzwa kwegasi kunoenderana nehutano hwevashandi uye kuchengetedzwa kwekushanda kwefekitori. Sei kuchena kwegasi kune simba rakakura kudaro pamutsetse wekuita uye vashandi? Uku hakusi kuwedzeredza, asi kunotarirwa nehunhu hunotyisa hwegasi pacharo.

Kurongeka kwemagasi akajairika muindasitiri yesemiconductor

Kazhinji Gasi

Gasi rakajairika rinodaidzwawo kunzi gasi rakawanda: rinoreva gasi rekumaindasitiri rine kuchena kunodiwa kwakaderera pane 5N uye yakakura kugadzira uye kutengesa vhoriyamu. Inogona kukamurwa kuita gasi rekuparadzanisa mhepo uye gasi rekugadzira zvinoenderana nenzira dzakasiyana dzekugadzirira. Hydrogen (H2), nitrogen (N2), okisijeni (O2), argon (A2), nezvimwewo;

Specialty Gas

Specialty gasi inoreva gasi remumaindasitiri rinoshandiswa munzvimbo chaidzo uye rine zvinodikanwa zvekuchena, zvakasiyana, uye zvivakwa. ZvikurukuruSiH4, PH3, B2H6, A8H3,HCL, CF4,NH3, POCL3, SIH2CL2, SIHCL3,NH3, BCL3, SIF4, CLF3, CO, C2F6, N2O, F2, HF, HBR,SF6… zvichingoenda zvakadaro.

Mhando dzeSpicial magasi

Mhando dzemagasi akakosha: anoparadza, ane chepfu, anopfuta, anotsigira kupisa, inert, nezvimwe.
Anowanzo shandiswa semiconductor magasi akaiswa seanotevera:
(i) Inoparadza/inokuvadza:HCl,BF3, WF6,HBr,SiH2Cl2,NH3,PH3,Cl2,BCl3…
(ii) Inopfuta: H2,CH4,SiH4,PH3,AsH3,SiH2Cl2,B2H6,CH2F2,CH3F,CO...
(iii) Inopisa: O2, Cl2, N2O, NF3...
(iv) Inert: N2,CF4, C2F6,C4F8,SF6CO2,Ne,Kr, Iye…

Mukuita semiconductor chip kugadzira, angangoita makumi mashanu emhando dzakasiyana magasi (anonzi akakosha magasi) anoshandiswa muoxidation, diffusion, deposition, etching, jekiseni, photolithography uye mamwe maitiro, uye iyo yakazara nhanho nhanho inodarika mazana. Semuenzaniso, PH3 neASH3 inoshandiswa se phosphorus uye arsenic masosi muiyo ion implantation process, F-based magasi CF4, CHF3, SF6 uye halogen magasi CI2, BCI3, HBr anowanzoshandiswa mukuita etching, SiH4, NH3, N2O mu. iyo deposition firimu process, F2/Kr/Ne, Kr/Ne mune yephotolithography process.

Kubva pane zviri pamusoro apa, tinogona kunzwisisa kuti akawanda semiconductor magasi anokuvadza kumuviri wemunhu. Kunyanya, mamwe magasi, akadai seSiH4, ari kuzvipisa. Chero bedzi vachidonha, ivo vanoita zvechisimba neokisijeni mumhepo uye vanotanga kupisa; uye ASH3 ine muchetura zvakanyanya. Chero kudonha kudiki kunogona kukuvadza hupenyu hwevanhu, saka izvo zvinodikanwa zvekuchengetedza dhizaini yedhizaini yekushandiswa kwemagasi akakosha zvakanyanya.

Semiconductors inoda yakakwirira-kuchena magasi kuti ave ne "madhigirii matatu"

Gasi kuchena

Izvo zviri mukati memhepo yekusachena mugasi zvinowanzoratidzwa sechikamu chegasi kuchena, senge 99.9999%. Kazhinji, kuchena kunodiwa kwemagetsi akakosha magasi anosvika 5N-6N, uye zvakare inoratidzwa nehuwandu hwehuwandu hwekusachena mumhepo yemukati ppm (chikamu pamiriyoni), ppb (chikamu pabhiriyoni), uye ppt (chikamu patiririyoni). Iyo yemagetsi semiconductor munda ine yakanyanya kudiwa yekuchena uye kugadzikana kwemhando yemagasi akakosha, uye kuchena kwemagetsi akakosha magasi kunowanzo hukuru kupfuura 6N.

Dryness

Zviri mukati mekutsvaga mvura mugasi, kana kunyorova, zvinowanzoratidzwa munzvimbo yedova, senge mumhepo yedova -70 ℃.

Utsanana

Huwandu hwezvikamu zvinosvibisa mugasi, zvimedu zvine saizi yeµm, zvinoratidzwa muhuwandu hwezvikamu/M3. Kumhepo yakamanikidzwa, inowanzoratidzwa mu mg / m3 yezvisingadzivisiki zvakasimba zvakasara, izvo zvinosanganisira zvinyorwa zvemafuta.