Mukugadzirwa kwemafekitori ekugadzira mawafer e semiconductor ane maitiro ekugadzira epamusoro-soro, mhando dzakasiyana dzemagasi dzinoda kusvika makumi mashanu. Magasi anowanzo kamurwa kuita magasi akawanda uyemagasi akakosha.

Kushandiswa kwemagasi muindasitiri dzemagetsi madiki nemaindasitiri e semiconductor Kushandiswa kwemagasi kwagara kuri basa rakakosha mumabasa e semiconductor, kunyanya maitiro e semiconductor anoshandiswa zvakanyanya mumaindasitiri akasiyana-siyana. Kubva kuULSI, TFT-LCD kusvika kuindasitiri ye micro-electromechanical (MEMS) iripo, maitiro e semiconductor anoshandiswa semaitiro ekugadzira zvigadzirwa, kusanganisira dry etching, oxidation, ion implantation, thin film deposition, nezvimwewo.

Semuenzaniso, vanhu vazhinji vanoziva kuti machipisi akagadzirwa nejecha, asi vachitarisa maitiro ese ekugadzira machipisi, zvinhu zvakawanda zvinodiwa, zvakaita se photoresist, polishing liquid, target material, special gas, nezvimwewo zvakakosha. Kurongedza kumashure kunodawo substrates, interposers, lead frames, bonding materials, nezvimwewo zvezvinhu zvakasiyana-siyana. Magasi emagetsi akakosha ndiwo echipiri pakukura mumitengo yekugadzira semiconductor mushure me silicon wafers, ichiteverwa nema masks nema photoresists.

Kuchena kwegasi kune simba guru pakushanda kwezvikamu uye kubereka kwechigadzirwa, uye kuchengetedzeka kwekuwanikwa kwegasi kwakabatana nehutano hwevashandi uye kuchengetedzeka kwekushanda kwefekitori. Sei kuchena kwegasi kuchikanganisa zvakanyanya mutsetse wekushanda nevashandi? Uku hakusi kuwedzeredza, asi kunotsanangurwa nehunhu hune njodzi hwegasi pacharo.

Kupatsanurwa kwemagasi akajairika muindasitiri yesemiconductor

Gasi Rakajairika

Gasi rinowanzo shandiswa rinonziwo gasi guru: rinoreva gasi remaindasitiri rine kuchena kunodiwa pasi pe5N uye huwandu hwakawanda hwekugadzira nekutengesa. Rinogona kukamurwa kuita gasi rekuparadzanisa mweya negasi rekugadzira zvinhu zvichienderana nenzira dzakasiyana dzekugadzirira. Hydrogen (H2), nitrogen (N2), oxygen (O2), argon (A2), nezvimwewo;

Gasi Rakakosha

Gasi remhando yepamusoro rinoreva gasi remaindasitiri rinoshandiswa munzvimbo dzakasiyana uye rine zvinodiwa zvakakosha pakuchena, kusiyana, uye hunhu.SiH4, PH3, B2H6, A8H3,HCL, CF4,NH3, POCL3, SIH2CL2, SIHCL3,NH3, BCL3, SIF4, CLF3, CO, C2F6, N2O, F2, HF, HBR,SF6… zvichingoenda zvakadaro.

Mhando dzemagasi eSpical

Mhando dzemagasi akakosha: anoparadza, ane chepfu, anobvira moto, anotsigira kupiswa, asina simba, nezvimwewo.
Magasi e semiconductor anoshandiswa zvakanyanya anoiswa muzvikamu zvinotevera:
(i) Inoparadza/ine chepfu:HCl、BF3、WF6、HBr、SiH2Cl2、NH3、PH3、Cl2、BCl3…
(ii) Inobvira: H2、CH4、SiH4,PH3,AsH3,SiH2Cl2,B2H6,CH2F2,CH3F,CO...
(iii) Inobvira: O2、Cl2、N2O、NF3…
(iv) Kusashanda: N2,CF4、C2F6、C4F8、SF6CO2,Ne、KrIye…

Mukugadzirwa kwemachipisi e semiconductor, mhando dzakasiyana dzemagasi akakosha dzinosvika makumi mashanu (dzinonzi magasi akakosha) dzinoshandiswa mu oxidation, diffusion, deposition, etching, injection, photolithography nedzimwe nzira, uye matanho ese ekuita anopfuura mazana. Semuenzaniso, PH3 neAsH3 zvinoshandiswa se phosphorus uye arsenic sources mu ion implantation process, magasi akavakirwa paF CF4, CHF3, SF6 uye halogen gases CI2, BCI3, HBr anowanzo shandiswa mu etching process, SiH4, NH3, N2O mu deposition film process, F2/Kr/Ne, Kr/Ne mu photolithography process.

Kubva pane zvataurwa pamusoro apa, tinogona kunzwisisa kuti magasi akawanda e semiconductor anokuvadza muviri wemunhu. Kunyanya, mamwe emagasi, akadai seSiH4, anozvibatidza ega. Chero bedzi achibuda, achaita zvine simba neokisijeni mumhepo otanga kupisa; uye AsH3 ine chepfu yakawanda. Chero kudonha kudiki kunogona kukonzera kukuvadza hupenyu hwevanhu, saka zvinodiwa kuti dhizaini yesystem yekudzora ishandiswe nemagasi akakosha ive yakachengeteka zvakanyanya.

MaSemiconductor anoda magasi akachena zvakanyanya kuti ave ne "madhigirii matatu"

Kuchena kwegesi

Hunhu hwemhepo isina kuchena mugasi hunowanzo ratidzwa sechikamu chekuchena kwegasi, senge 99.9999%. Kazhinji, chinodiwa chekuchena kwemagasi akakosha emagetsi chinosvika 5N-6N, uye chinoratidzwawo nechiyero chehuwandu hwemhepo isina kuchena ppm (chikamu pamiriyoni), ppb (chikamu pabhiriyoni), uye ppt (chikamu patiriyoni). Munda wemagetsi we semiconductor une zvinodiwa zvepamusoro zvekuchena uye kugadzikana kwemhando yemagasi akakosha, uye kuchena kwemagasi akakosha emagetsi kunowanzo kuve kwakakura kupfuura 6N.

Kuoma

Mvura iri mugasi, kana kuti hunyoro, inowanzoonekwa munzvimbo ine dova, senge nzvimbo ine dova mumhepo -70℃.

Kuchena

Huwandu hwezvinhu zvinosvibisa mugasi, zvinhu zvine saizi yezvikamu zve µm, hunoratidzwa nenhamba yezvikamu/M3. Pamhepo yakamanikidzwa, inowanzoonekwa mu mg/m3 yezvakasara zvakasimba zvisingadzivisike, zvinosanganisira huwandu hwemafuta.