Kukura kweEpitaxial (kukura)Mixed Gas

Muindasitiri yesemiconductor, gasi rinoshandiswa kukura jira rimwe kana kupfuura rezvinhu kuburikidza nekuisa makemikari evapor pane substrate yakasarudzwa zvakanaka rinonzi epitaxial gas.

Magasi esilicon epitaxial anoshandiswa zvakanyanya anosanganisira dichlorosilane, silicon tetrachloride uyesilaneInonyanya kushandiswa pakuiswa kwesilicon mu epitaxial, kuiswa kwesilicon oxide film, kuiswa kwesilicon nitride film mu silicon, kuiswa kwesilicon film mu amorphous yemasero ezuva nemamwe ma photoreceptors, nezvimwewo. Epitaxy inzira iyo chinhu chimwe chete chekristaro chinoiswa uye chinokura pamusoro pe substrate.

Kubviswa kweUtsi hweMakemikari (CVD) Gasi Rakasanganiswa

CVD inzira yekuisa zvimwe zvinhu nemakomputa kuburikidza ne gas phase chemical reactions uchishandisa volatile compounds, kureva, nzira yekugadzira firimu uchishandisa gas phase chemical reactions. Zvichienderana nerudzi rwefirimu rakagadzirwa, gasi rinoshandiswa re chemical vapor deposition (CVD) rakasiyanawo.

Kushandisa zvinodhaka zvisina kunakaGasi Yakasanganiswa

Mukugadzirwa kwemidziyo ye semiconductor uye ma integrated circuits, mamwe marara anoiswa mumidziyo ye semiconductor kuti zvinhu zviwane rudzi rwe conductivity inodiwa uye resistivity chaiyo yekugadzira resistors, PN junctions, buried layers, nezvimwewo. Gasi rinoshandiswa mu doping process rinonzi doping gas.

Zvikuru zvinosanganisira arsine, phosphine, phosphorus trifluoride, phosphorus pentafluoride, arsenic trifluoride, arsenic pentafluoride,boron trifluoride, diborane, nezvimwewo.

Kazhinji, chinhu chinopa mushonga wekushandisa mushonga wekuwedzera (doping source) chinosanganiswa negasi rinotakura (rakaita seargon nenitrogen) mukabati rekushandisa mushonga wekuwedzera. Mushure mekusanganisa, kuyerera kwegasi kunopinzwa muchoto chinopararira uye kunokomberedza wafer, kuchiisa zvinhu zvinopa mushonga pamusoro pewafer, uye wobva wasangana nesilicon kugadzira simbi dzine mushonga wekuwedzera dzinofamba dzichiita silicon.

KuchekaMusanganiswa weGasi

Kucheka kunoreva kubvisa pamusoro pechinhu chinogadziriswa (senge firimu resimbi, firimu resilicon oxide, nezvimwewo) pane chinhu chisina kuvharwa ne photoresist, ukuwo uchichengetedza nzvimbo yacho ne photoresist masking, kuitira kuti pave nemufananidzo unodiwa pamusoro pechinhu chacho.

Nzira dzekutema dzinosanganisira kutema makemikari akanyorova uye kutema makemikari akaoma. Gasi rinoshandiswa mukucheka makemikari akaoma rinonzi gasi rekucheka.

Gasi rinocheka kazhinji igesi ine fluoride (halide), yakadai setetrafluoride kabhoni, nitrogen trifluoride, trifluoromethane, hexafluoroethane, perfluoropropane, nezvimwewo.