Kushandiswa kwe tungsten hexafluoride (WF6)

Tungsten hexafluoride (WF6) inoiswa pamusoro peiyo wafer kuburikidza neCVD maitiro, ichizadza simbi yekubatanidza migero, uye kugadzira iyo simbi yekubatanidza pakati pematanho.

Ngatitaure nezve plasma kutanga. Plasma imhando yenyaya inonyanya kuumbwa nemaerekitironi emahara uye maion anochajiwa. Inowanikwa zvakanyanya muchadenga uye inowanzoonekwa seyechina mamiriro ezvinhu. Inonzi plasma state, inonziwo "Plasma". Plasma ine yakakwira magetsi conductivity uye ine yakasimba coupling mhedzisiro ine electromagnetic munda. Igasi rine ionized, rinoumbwa nemaerekitironi, ions, free radicals, neutral particles, uye photons. Iyo plasma pachayo isanganiswa yemagetsi isina kwayakarerekera ine zvidimbu zvemuviri uye zvemakemikari zvinoshanda.

Tsananguro yakananga ndeyekuti pasi pekuita kwesimba guru, molecule inokunda van der Waals force, chemical bond force neCoulomb force, uye inopa chimiro chemagetsi asina kwaakarerekera. Panguva imwecheteyo, simba guru rinopiwa nekunze rinokunda masimba matatu ari pamusoro apa. Basa, maerekitironi uye maion zvinopa yakasununguka mamiriro, ayo anogona kushandiswa zvisirizvo pasi pemagineti modulation, semiconductor etching process, CVD process, PVD uye IMP process.

Chii chinonzi simba guru? Muchirevo, zvese zviri zviviri tembiricha yakakwira uye yakakwira frequency RF inogona kushandiswa. Kazhinji kutaura, tembiricha yepamusoro inenge isingabviri kuwana. Tembiricha inodiwa yakakwira zvakanyanya uye inogona kunge iri pedyo nekupisa kwezuva. Zvikuru hazvibviri kuwana mukuita. Naizvozvo, iyo indasitiri inowanzo shandisa yakakwira-frequency RF kuti iite. Plasma RF inogona kusvika kusvika 13MHz+.

Tungsten hexafluoride inonzi plasmaized pasi pechiito chemunda wemagetsi, uye ipapo mhute-inoiswa nemagnetic field. W maatomu akafanana neminhenga yehandi yechando uye anowira pasi pasi pechiito chegiravhiti. Zvishoma nezvishoma, maatomu eW anoiswa mukati memaburi, uye pakupedzisira anozadzwa Yakazara nemumaburi kuti iumbe simbi inobatana. Pamusoro pekuisa maatomu eW mumaburi, anozoiswawo pamusoro peWafer here? Hongu, zvechokwadi. Kazhinji kutaura, unogona kushandisa W-CMP maitiro, inova yatinodaidza kuti mechanic grinding process kubvisa. Zvakafanana nekushandisa mutsvairo kutsvaira pasi mushure mechando chakanyanya. Sinou iri pasi inokukurwa, asi chando chiri mugomba riri pasi chichasara. Pasi, zvakangofanana.