Tungsten hexafluide (WF6) yakaiswa pamusoro pewafer kuburikidza neCVD maitiro, ichizadza iyo simbi yekubatira maTrenches, uye kugadzira iyo simbi yekubatana pakati pezvikamu.
Ngatitaurei nezve plasma kutanga. Plasma ndiyo fomu yenyaya inonyanya kuumbwa nemagetsi emahara uye akapomerwa ions. Izvo zviripo zvakanyanya mune zvakasikwa uye zvinowanzoonekwa sechina mamiriro ezvinhu. Inonzi iyo Plasma State, inonziwo "plasma". Plasma ine magetsi makuru eMagetsi uye ane yakasimba compling maitiro ane emagetsignitwork munda. Icho gasi rakarukwa, rinoumbwa nemagetsi, ion, ma radicals yemahara, kusarerekera kwematsotsi, uye mafoto. Iyo plasma pachayo ndeye musanganiswa wekusarerekera une hanya une mumuviri uye nemakemikari zvimedu zvinoshanda.
Tsananguro yakatwasuka ndeyekuti iri pasi pekuita kwesimba rakakwira, molekyula ichakunda iyo vankeya yemakemikari, mishonga yemakemikari uye chirwere cheCluolomb, uye chengetedza fomu yekusarerekera kwesarudzo. Panguva imwecheteyo, iyo yakakwirira simba yakadzivirirwa kunze kwekunze inokurira mauto matatu matatu. Basa, maEkiseni uye ion anounza mamiriro emahara, ayo anogona kushandisirwa pasi pekushandiswa kwemunda wemagiripi, akadai se semiconondductor etching maitiro, CVD maitiro, PVD uye gadziriro yePVD.
Chii chinonzi simba repamusoro? Mufundisi, tembiricha yakakwira uye yakakwira frequency rf inogona kushandiswa. Kazhinji kutaura, tembiricha yakakwira ingangoita kuti izadzise. Izvi zvinodikanwa zvekushisa zvakanyanyisa uye zvinogona kunge zviri pedyo nekushisa kwezuva. Izvo hazvigoneke kuzadzisa mune maitiro. Naizvozvo, iyo indasitiri inowanzoshandisa yakakwira-frequency rf kuti izadzite. Plasma RF inogona kusvika yakakwira se18mhz +.
Tungsten Hexfluoride iri plasmazed pasi pechiitiko chemunda wemagetsi, uye ipapo mupfu-wakaiswa nemagineti yemagineti. MaAtomu akafanana neCustom Fower Minhena uye anowira pasi pasi pechiito chegiravhiti. Zvishoma nezvishoma, maatomu anoiswa mumabhawa, uye pakupedzisira akazadzwa zvakakwana kuburikidza nemakomba ekugadzira metal interconcections. Pamusoro pekuisa maatomu emains mumakomba, ivo vanozoiswawo pamusoro peakatsemurwa here? Ehe, zvirokwazvo. Kazhinji, unogona kushandisa iyo W-CMP maitiro, ndeipi yatinodaidza iyo mechancal yekukuya kuita kuti ubvise. Zvakafanana nekushandisa mutsvairo kutsvaira pasi mushure mekurema kwechando. Chando pasi rwacho rwakatsvairwa, asi chando chiri mugomba pasi zvicharamba zviripo. Pasi, zvakafanana zvakafanana.
Kutumira Nguva: Dec-24-2021
