Tungsten hexafluoride (WF6) inoiswa pamusoro pewafer kuburikidza neCVD process, ichizadza makomba ekubatanidza simbi, uye ichigadzira kubatana kwesimbi pakati pezvikamu.
Ngatitangei tataura nezve plasma. Plasma imhando yezvinhu zvinoumbwa nema electron akasununguka nema ions ane chaji. Inowanikwa zvakanyanya muchadenga uye inowanzoonekwa semamiriro echina ezvinhu. Inonzi plasma state, inonziwo "Plasma". Plasma ine conductivity yepamusoro yemagetsi uye ine simba rekubatanidza nesimba remagetsi. Igasi rine ionized zvishoma, rinoumbwa nema electron, ions, free radicals, neutral particles, uye photons. Plasma pachayo musanganiswa we electrically neutral une physically uye chemically active particles.
Tsananguro iri nyore ndeyekuti pasi pesimba rakawanda, molekyuru ichakunda simba revan der Waals, simba remakemikari uye simba reCoulomb, uye icharatidza rudzi rwemagetsi asina kwaakarerekera zvachose. Panguva imwe chete, simba rakawanda rinopihwa nekunze rinokunda masimba matatu ari pamusoro apa. Basa, maerekitironi nemaion zvinopa mamiriro akasununguka, ayo anogona kushandiswa nemaoko pasi pekuchinja kwesimba remagineti, senge semiconductor etching process, CVD process, PVD uye IMP process.
Chii chinonzi simba rakawanda? Mupfungwa, tembiricha yakakwira uye frequency yakakwira RF zvinogona kushandiswa. Kazhinji, tembiricha yakakwira inenge isingaite. Kudiwa kwetembiricha uku kwakanyanya uye kunogona kunge kuri pedyo nekupisa kwezuva. Hazvigoneke kuzviita mukuita uku. Nokudaro, indasitiri inowanzo shandisa frequency yakakwira RF kuti izvi zviitike. Plasma RF inogona kusvika pa13MHz+.
Tungsten hexafluoride inoiswa muplasma pasi pesimba remagetsi, uye yozoiswa muutsi nesimba remagineti. Maatomu eW akafanana neminhenga yegoose yechando uye anowira pasi pasi pesimba regiravhiti. Zvishoma nezvishoma, maatomu eW anoiswa mumaburi, uye pakupedzisira anozadzwa nemaburi akazara kuti agadzire maburi esimbi. Pamusoro pekuisa maatomu eW mumaburi, achaiswawo pamusoro peWafer here? Ehe, zvechokwadi. Kazhinji, unogona kushandisa maitiro eW-CMP, ayo atinodaidza kuti maitiro ekukuya emuchina ekubvisa. Zvakafanana nekushandisa mutsvairo kutsvaira pasi mushure mechando chakawanda. Chando chiri pasi chinobviswa, asi chando chiri mugomba riri pasi chicharamba chiripo. Pasi, zvakafanana.
Nguva yekutumira: Zvita-24-2021
