Sarufa Hexfluori igasi negesi yakanakisa yekuchinja zvinhu uye inowanzoshandiswa muArC yekudzima uye vatashi-voltage triptems, kuwedzera mabasa aya, Sulfa Hexfluori. Electronic giredhi yakakwirira-nyanga sarufa hexfluorili iine yakakodzera etchantrant etchant, iyo inoshandiswa zvakanyanya mumunda weanenge tekinoroji yemachira. Nhasi, niu ruide yakakosha gasi yeMeueyue ichaunza kushandiswa kweSulfu hexfluoride muSilicon nitreide etching uye pesvedzero yemapapeti akasiyana.
Isu tinokurukura nezveSf6 plasma etching Sinx maitiro, iyo gasi retiji yeSFTEM Kuzvisiyanisa chiyero, uye kuongorora hukama pakati pekuchinja kweSinx etching rate uye iyo plasma mhando dzekusangana.
Zvidzidzo zvakawana kuti apo simba ririmo richikura, huwandu hwekuita hunowedzera; Kana iyo kuyerera kweSF6 muPlasma inowedzera, iyo Fatomu yekuvhara inowedzera uye inoenderana neiyo etching rate. Mukuwedzera, mushure mekuwedzera iyo cationic gasi o2 pasi peiyo yakatarwa kuyerera chiyero, ichave neyakawedzera maitiro, . Asi panguva imwe chete, iyo maatomu muPlasma ari kuwedzera uye zviri nyore kuumba Siox Naizvozvo, mwero wekutora anotanga kudzora kana iyo O2 / sf6 ratio iri padyo ne1. (3) apo iyo O2 / sf6 ratio yakakura kupfuura 1, chiyero cheEtching chinoderera. Nekuda kwekuwedzera kukuru muO2, iyo yakaparadzaniswa f maatomu kuderedza ne o2 uye fomu ye, iyo inoderedza kusunganidzwa kweF maatomu, zvichikonzera kuderera kwemari yekuita. Inogona kuoneka kubva pane izvi apo O2 inowedzerwa, iyo inoyerera ratio yeO2 / sf6 iri pakati pe0.2 uye 0.8, uye iyo yakanakisa etching rate inogona kuwanikwa.
Kutumira Nguva: Dec-06-2021
