Hexafluoride yeSulfur igesi ine hunhu hwakanaka hwekudzivirira kupisa uye inowanzoshandiswa mukudzimisa arc ine voltage yakawanda uye matransformer, mitsetse yekutumira magetsi ine voltage yakawanda, matransformer, nezvimwewo. Zvisinei, pamusoro pemabasa aya, hexafluoride yesulfur inogonawo kushandiswa sechishongo chemagetsi. Hexafluoride yeSulfur yemhando yepamusoro yakachena ishongo yemagetsi yakanaka, iyo inoshandiswa zvakanyanya mumunda wetekinoroji yemicroelectronics. Nhasi, mupepeti wegesi weNiu Ruide special gas Yueyue achaunza kushandiswa kwesulfur hexafluoride mu silicon nitride etching uye pesvedzero yezvikamu zvakasiyana.
Tinokurukura nezvemaitiro eSF6 plasma etching SiNx, kusanganisira kushandura simba replasma, chiyero chegasi cheSF6/He uye kuwedzera gasi recationic O2, tichikurukura nezvesimba rayo pachiyero chekudzivirira cheSiNx element protection layer yeTFT, uye kushandisa plasma radiation. Iyo spectrometer inoongorora shanduko dzehuwandu hwemhando yega yega muSF6/He, SF6/He/O2 plasma uye chiyero chekuparadzanisa cheSF6, uye inoongorora hukama huripo pakati pekuchinja kwechiyero cheSiNx etching uye huwandu hwemhando dzeplasma.
Zvidzidzo zvakawana kuti kana simba replasma rawedzerwa, mwero wekuchekerera unowedzera; kana mwero wekuyerera kweSF6 muplasma ukawedzerwa, huwandu hweatomu yeF hunowedzera uye hunoenderana zvakanaka nemwero wekuchekerera. Pamusoro pezvo, mushure mekuwedzera gasi recationic O2 pasi pemwero wehuwandu hwakatarwa, zvichave nemigumisiro yekuwedzera mwero wekuchekerera, asi pasi pemwero wekuyerera kweO2/SF6 wakasiyana, pachava nenzira dzakasiyana dzekuita, dzinogona kukamurwa kuita zvikamu zvitatu: (1) Mwero wekuyerera kweO2/SF6 mudiki kwazvo, O2 inogona kubatsira kupatsanurwa kweSF6, uye mwero wekuchekerera panguva ino wakakura pane kana O2 isina kuwedzerwa. (2) Kana mwero wekuyerera kweO2/SF6 wakakura kupfuura 0.2 kusvika panguva iri kusvika 1, panguva ino, nekuda kwehuwandu hwakawanda hwekupatsanurwa kweSF6 kuumba maatomu eF, mwero wekuchekerera ndiwo wakanyanya kukwira; asi panguva imwe chete, maatomu eO muplasma ari kuwedzerawo uye Zviri nyore kuumba SiOx kana SiNxO(yx) nepamusoro pefirimu reSiNx, uye maatomu eO akawanda anowedzera, maatomu eF anonyanya kuoma pakuita kwekucheka. Nokudaro, chiyero chekucheka chinotanga kudzikira kana chiyero cheO2/SF6 chiri pedyo ne1. (3) Kana chiyero cheO2/SF6 chiri chikuru kupfuura 1, chiyero chekucheka chinoderera. Nekuda kwekuwedzera kukuru kweO2, maatomu eF akaparadzaniswa anogovana neO2 uye fomu reOF, izvo zvinoderedza kuwanda kwemaatomu eF, zvichikonzera kudzikira kwechiyero chekucheka. Zvinogona kuonekwa kubva pane izvi kuti kana O2 yawedzerwa, chiyero chekuyerera kweO2/SF6 chiri pakati pe0.2 ne0.8, uye chiyero chakanakisa chekucheka chinogona kuwanikwa.
Nguva yekutumira: Zvita-06-2021
