Zvivakwa uye hunhu hwemagetsi giredhi hydrogen chloride uye kunyorera kwayo muMicemonDuctrs

Hydrogen chlorideigasi risina ruvara rine unonhuhwirira. Mhinduro yayo yemvura inonzi iyo hydrochloric acid, inozivikanwa zvakare se hydrochloric acid. Hydrogen chloride inonyura kwazvo mumvura. At 0 ° C, 1 vhoriyamu yemvura inogona kunyungudika anenge 500 mavhoriyamu e hydrogen chloride.

Iyo ine inotevera zvinhu uye maitiro:

1. Kuwanda Kwekuchena

Kuchena kwegiredhi yemagetsiHydrogen chlorideyakakwira kwazvo, kazhinji paPPM kana yakadzika mwero, kuona kuti hapana tsvina inounzwa mumifananidzo yeMiconondUctor yekugadzira.

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2. Inserness

Iyo ndiyo yemakemikari inert gasi iyo isingaite nezvimwe zvinhu zvakawanda, izvo zvakakosha kuti udzivise kusvibiswa kwezvinhu zvemutemo nemidziyo.

3. Yakakwirira kugadzikana

Electronic giredhiHydrogen chloridekazhinji ine yakagadzikana chemistry yekuona yakavimbika semiconductor yekugadzirisa.

MuSemiconductor Kugadzirisa, iyo mainini ekushandisa giredhi giredhi hydrogen chloride inosanganisira:

1. Kumusoro kuchenesa uye kugadzirira

Semunhu anoshanda pasi pekasati, giredhi remagetsiHydrogen chlorideinoshandiswa kubvisa oxides uye kusvibiswa kubva pane substrate pamusoro kuti uve nechokwadi chekunaka uye kuchena kweiyo epitaxial layer kana firimu.

2.Pitaxial Kukura Kubatsira

Inoshandiswa seyakagadzirirwa kurapwa mumiririri muEpitaxial maitiro, inobatsira kuvandudza kunaka kweiyo epitaxial layer

3. Substrate kunyepedzera

Pamberi pekugadzirira kweMicononductor zvishandiso, giredhi remagetsiHydrogen chlorideinogona kushandiswa kurapa iyo substrate pamusoro kuti iite chigadziko chakagadzikana kuti uvandudze kuderedza pakati peiyo nziraxial layer uye substrate.

4. Deposition Auxiliary Agent

Mukuita kwemakemikari apor position (CVD) kana mupamiro mutambi wekupfekwa (PVD), magetsi ehurongwa hydrogen chloride

5. Gasi-phose kuendesa mumiririri

Sechikamu chegesi-phase yekufambisa, mamwe magetsi ezvekutungamira anounzwa mukamuri yekuita kuti abatsire kugadzirisa chiyero chekubhadhara uye kufanana kwechinyorwa.

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Aya maitiro anoita giredhi remagetsiHydrogen chlorideAnonyanya kukosha ekugadzira mumiriri muSemiconductor tekinoroji, iyo ine kiyi kukanganisa pane kuita uye kuvimbika kwechishandiso chekupedzisira.

Pamusoro pekushandiswa kwayo muSemiconductor Process, magetsi hydrogen chloride anogona kuwana mashandisiro akasiyana mune dzimwe nzvimbo, masero emhando, Semiconductor Kukura, Mporductor Phase Bithography, Kuongorora Kwemakemikari, Kuongorora Kemical.

Muzhinji, giredhi remagetsiHydrogen chloridechinhu chose, chakachena chegesi ine huwandu hwakawanda hwekushandisa kunze kweMicononductor kugadzira.


Kutumira Nguva: Dec-17-2024