Gasi reLaser rinonyanya kushandiswa pakugadzira laser annealing nelithography gasi muindasitiri yezvemagetsi. Nekubatsirwa nekuvandudzwa kwemafoni efoni uye kuwedzera kwenzvimbo dzekushandisa, huwandu hwemusika wepolysilicon une tembiricha yakaderera huchawedzerwa, uye maitiro ekugadzira laser annealing akavandudza zvakanyanya mashandiro eTFTs. Pakati pemagasi eNeon, fluorine, uye argon anoshandiswa muArF excimer laser yekugadzira semiconductors, neon inodarika 96% yemusanganiswa wegasi reLaser. Nekuvandudzwa kwetekinoroji yesemiconductor, kushandiswa kwemaexcimer laser kwakawedzera, uye kuunzwa kwetekinoroji yedouble exposure kwakaita kuti kudiwa kwegasi reNeon rinodyiwa neArF excimer lasers kuwedzere zvakanyanya. Vachibatsirwa nekusimudzirwa kwenzvimbo yemagasi emagetsi, vagadziri vemuno vachave nenzvimbo iri nani yekukura kwemusika mune ramangwana.
Muchina weLithography ndiwo midziyo mikuru yekugadzira semiconductor. Lithography inotsanangura saizi yematransistors. Kugadzirwa kwakarongeka kweindasitiri yelithography ndiyo kiyi yekubudirira kwemuchina welithography. Zvinhu zve semiconductor zvinoenderana zvakaita se photoresist, photolithography gas, photomask, uye coating uye kugadzira michina zvine tekinoroji yakakwira. Gasi reLithography ndiro gasi rinogadzirwa nemuchina welithography ne deep ultraviolet laser. Magasi akasiyana e lithography anogona kugadzira manyuko echiedza che wavelengths akasiyana, uye wavelength yavo inokanganisa zvakananga resolution yemuchina welithography, inova imwe yecores yemuchina welithography. Muna 2020, kutengeswa kwese kwemuchina welithography pasi rose kuchave mayuniti 413, ayo ASML sales mayuniti 258 aive 62%, Canon sales mayuniti 122 aive 30%, uye Nikon sales mayuniti 33 aive 8%.
Nguva yekutumira: Gumiguru-15-2021
