Laser gasi rinonyanya kushandiswa kwelaser annealing uye lithography gasi muindasitiri yemagetsi. Kubatsirwa nekuvandudzwa kwezviratidziro zvenharembozha uye nekuwedzera kwenzvimbo dzekushandisa, chiyero chemusika wepolysilicon wepasi-tembiricha uchawedzerwa, uye maitiro elaser annealing akavandudza zvakanyanya mashandiro eTFTs. Pakati peneon, fluorine, uye argon magasi anoshandiswa muArF excimer laser yekugadzira semiconductors, neon accounts inodarika 96% yemusanganiswa welaser gasi. Nekukwenenzverwa kwe tekinoroji yesemiconductor tekinoroji, kushandiswa kweexcimer lasers kwawedzera, uye kuunzwa kwekaviri kuratidzwa tekinoroji kwakonzera kuwedzera kwakanyanya kwekuda kweneon gasi rinopedzwa neArF excimer lasers. Kubatsirwa kubva mukusimudzirwa kwenzvimbo yemagetsi anokosha magasi, vagadziri vepamba vachava nenzvimbo iri nani yekukura kwemusika mune ramangwana.
Lithography muchina ndiyo yakakosha midziyo yekugadzira semiconductor. Lithography inotsanangura saizi ye transistors. Iko kurongeka kwakagadziridzwa kweiyo lithography indasitiri cheni ndiyo kiyi yekubudirira kwemuchina welithography. Iwo anofananidza semiconductor zvinhu senge photoresist, photolithography gasi, photomask, uye coating uye kugadzira michina ine yakakwirira tekinoroji zvemukati. Lithography gasi ndiyo gasi iro muchina welithography unoburitsa yakadzika ultraviolet laser. Different lithography magasi anogona kuburitsa chiedza masosi ezvakasiyana wavelengths, uye wavelength yavo inokanganisa zvakananga kugadziriswa kwemuchina welithography, inova imwe yemacores emuchina welithography. Muna 2020, kutengeswa kwese kwepasirese kwemachina e-lithography kuchave mazana mana negumi nematatu ezvikamu, izvo zvinotengeswa zveASML zvikamu makumi maviri neshanu zvakaverengerwa makumi matanhatu neshanu muzana, Canon kutengesa zvikamu zana nemakumi maviri nemaviri zvakaverengerwa makumi matatu muzana, uye Nikon kutengesa 33 mayunitsi akaverengera 8%.
Nguva yekutumira: Oct-15-2021
