Boron trichloride (BCl3)is an inorganic compound inowanzoshandiswa mukuoma etching uye kemikari vapor deposition (CVD) maitiro mukugadzira semiconductor. Igasi risina ruvara uye rine kunhuhwirira kwakasimba kwemukamuri tembiricha uye rinonzwa kumhepo ine mwando nekuti rinoita hydrolyzes kuburitsa hydrochloric acid uye boric acid.

Kushandiswa kweBoron Trichloride

Mune semiconductor indasitiri,Boron trichlorideinonyanya kushandiswa kuomesa etching yealuminium uye sedopant kuumba matunhu eP-mhando pasilicon wafers. Inogona zvakare kushandiswa kupinza zvinhu zvakaita seGaAs, Si, AlN, uye senge boron sosi mune mamwe maapplication. Pamusoro pezvo, Boron trichloride inoshandiswa zvakanyanya mukugadzira simbi, indasitiri yegirazi, kuongororwa kwemakemikari uye kutsvagisa marabhoritari.

Kuchengetedzwa kweBoron Trichloride

Boron trichlorideinoita ngura uye ine chepfu uye inogona kukuvadza maziso neganda zvakanyanya. Ino hydrolyze mumhepo ine mwando kuburitsa muchetura wehydrogen chloride gasi. Nokudaro, matanho akakodzera ekuchengetedza anofanira kutorwa pakubataBoron trichloride, kusanganisira kupfeka zvipfeko zvinodzivirira, magirazi uye midziyo yekudzivirira yekufema, uye kushanda munzvimbo ine mhepo inofefetera.