Boron trichloride (BCl3)imusanganiswa wezvinhu zvisingasanganisike (inorganic compound) unoshandiswa zvakanyanya mukugadzira zvinhu zvakaita se dry etching and chemical vapor deposition (CVD) mukugadzira zvinhu zvakaita se semiconductor. Igasi risina ruvara rine hwema hwakasimba patembiricha yemumba uye rinonzwa mhepo ine hunyoro nekuti rinonyungudika kuti rigadzire hydrochloric acid ne boric acid.

Mashandisirwo eBoron Trichloride

Muindasitiri yesemiconductor,Boron trichlorideInonyanya kushandiswa pakucheka aruminiyamu neakaoma uye sechinopa simba rekugadzira nzvimbo dzemhando yeP pa silicon wafers. Inogona zvakare kushandiswa kucheka zvinhu zvakaita seGaAs, Si, AlN, uye senzvimbo yeboron mune mamwe mashandisirwo chaiwo. Pamusoro pezvo, Boron trichloride inoshandiswa zvakanyanya mukugadzira simbi, indasitiri yegirazi, kuongorora makemikari uye kutsvagisa murabhoritari.

Kuchengetedzwa kweBoron Trichloride

Boron trichlorideinoparadza uye ine chepfu uye inogona kukonzera kukuvara kwakanyanya kumaziso neganda. Inonyungudika mumhepo ine hunyoro kuti ibudise gasi rine chepfu rehydrogen chloride. Saka, matanho akakodzera ekuchengetedza anofanirwa kutorwa pakubataBoron trichloride, kusanganisira kupfeka mbatya dzekudzivirira, magirazi ekudzivirira nemidziyo yekudzivirira kufema, uye kushanda munzvimbo ine mhepo inofefetera zvakanaka.