Ultra-yakakwirira kuchena (UHP) magasi ndiwo ane hupenyu hweiyo semiconductor indasitiri. Sezvo kudiwa kusati kwamboitika uye kukanganisa kumaketani ekugovera epasi rose kunokwidza mutengo weyakanyanya-yakanyanya kudzvanywa gasi, nyowani semiconductor dhizaini uye maitiro ekugadzira ari kuwedzera mwero wekudzora kusvibiswa kunodiwa. Kune vanogadzira semiconductor, kukwanisa kuona kuchena kweUHP gasi kwakakosha kupfuura nakare kose.

Ultra Yakakwirira Kuchena (UHP) Magasi Akanyanya Kunetsa Mumazuva Ano Semiconductor Manufacturing.

Imwe yemashandisirwo makuru eUHP gasi ndeye inertization: UHP gasi rinoshandiswa kupa mhepo inodzivirira yakatenderedza semiconductor zvikamu, nekudaro ichivadzivirira kubva kune zvinokuvadza zvinokonzerwa nehunyoro, okisijeni uye zvimwe zvinosvibisa mumhepo. Nekudaro, inertization ingori imwe yeakawanda akasiyana mabasa ayo magasi anoita muindasitiri yesemiconductor. Kubva pamagasi ekutanga eplasma kusvika kune magasi anoshanda mukucheka uye kuvharisa, ekupedzisira-yakanyanya kudzvanywa magasi anoshandiswa kune zvakawanda zvakasiyana zvinangwa uye akakosha mukati mesemiconductor yekugovera cheni.

Mamwe e "core" magasi muindasitiri ye semiconductor anosanganisiranitrogen(inoshandiswa seyakajairwa yekuchenesa uye inert gasi),argon(inoshandiswa seyakanyanya plasma gasi mu etching uye deposition reactions),helium(inoshandiswa segasi inert ine yakakosha kupisa-kutamisa zvivakwa) uyehydrogen(inotamba akawanda mabasa mu annealing, deposition, epitaxy uye plasma kuchenesa).

Sezvo semiconductor tekinoroji yakashanduka uye yachinja, ndizvo zvakaitawo magasi anoshandiswa mukugadzira. Nhasi, zvidyarwa zvekugadzira semiconductor zvinoshandisa huwandu hwakawanda hwemagasi, kubva kumagasi akanaka akadaikryptonuyeneonkune zvipenyu zvinogadzirisa zvakadai senitrogen trifluoride (NF 3) uye tungsten hexafluoride (WF 6).

Kukura kudiwa kwekuchena

Kubva pakugadzirwa kwekutanga kwekutengesa microchip, nyika yakaona kunoshamisa kuri pedyo-kuwedzeredza kuwedzera kwekuita kwemidziyo yesemiconductor. Mumakore mashanu apfuura, imwe yenzira dzechokwadi dzekuzadzisa rudzi urwu rwekuvandudzwa kwekuita kwave kuburikidza ne "kukura kuyera": kudzikisa zviyero zvakakosha zveiyo iripo chip architecture kuitira kudzvanya ma transistors munzvimbo yakapihwa. Pamusoro peizvi, kuvandudzwa kwezvivakwa zvitsva zvechip uye kushandiswa kwezvinhu zvekucheka-kumucheto kwakaburitsa kusvetuka mukuita kwechishandiso.

Nhasi, zviyero zvakakomba zvekucheka-kumucheto semiconductors ikozvino idiki zvekuti kuyera saizi haisisiri nzira inoshanda yekuvandudza mashandiro emudziyo. Pane kudaro, semiconductor vatsvakurudzi vari kutsvaga mhinduro mumhando yezvinyorwa zvitsva uye 3D chip architectures.

Makumi emakumi emakumi emakumi emakore ekugadzirisa kusaneta anoreva kuti nhasi semiconductor zvishandiso zvine simba zvakanyanya kupfuura mamicrochips ekare - asi iwo zvakare asina kusimba. Kuuya kwe300mm wafer yekugadzira tekinoroji kwakawedzera mwero wehutsvina hutongi hunodiwa pakugadzira semiconductor. Kunyangwe kusvibiswa kudiki mukugadzira (kunyanya isingawanzo kana inert magasi) kunogona kukonzera njodzi kutadza kwemidziyo - saka kuchena kwegasi ikozvino kwakakosha kupfuura kare.

Kune yakajairwa semiconductor yekugadzira chirimwa, Ultra-yakakwirira-kuchena gasi yatove yakakura mari yezvinhu mushure mesilicon pachayo. Iyi mitengo inongotarisirwa kuwedzera sezvo kudiwa kwema semiconductors kuchikwira kusvika pakakwirira. Zviitiko muEurope zvakakonzera kumwe kuvhiringika kumusika wegasi wegasi wakanyanya kuoma. Ukraine ndeimwe yepasirese vatengesi vepamusoro-kuchenaneonzviratidzo; Kupinda kweRussia kunoreva kuti kupihwa kwegasi risingawanzo kuve kuri kumanikidzwa. Izvi zvakazokonzera kushomeka uye mitengo yakakwira yemamwe magasi akanaka akadaikryptonuyexenon.