Inopisa yekutengesa kabhoni tetrafluoride / tetrafluor.si cf4 gasi 99.999% yekuchena yemagetsi giredhi re semicononductor

Nehunyanzvi hwepamusoro uye zvivakwa, mutengo wakasimba, mutengo unonzwisisika, wakazvimiririra kuendesa kune vatengi veCAFBon Simbisa nguva refu yekambani yekambani yekambani yerudo nevatengi uye vashandisi vese vakatenderedza nyika yese.
Neakakwirira tekinoroji uye zvivakwa, zvakashata zvemhando, mutengo unonzwisisika, unopa muripo uye kuvhara kubatana nevatengi, isu takazvipira kuendesa kubatsirwa kwakanyanya kune vatengi vedu veChina cf4 uye cf4 gasi, Isu tinotarisa pakupa sevhisi vatengi vedu sechinhu chakakosha mukusimbisa hukama hwenyu kwenguva refu. Kuwanika kwedu nguva dzose kwezvinhu zvakakwirira zvegiredhi zvine musanganiswa neyedu yakanaka pre-kutengesa uye mushure mekutengesa-yekutengesa basa rinovimbisa kukwikwidza kwakasimba mumusika unowedzera pasi rose. Isu tinoda kushandira pamwe neshamwari dzebhizinesi kubva kumba uye kunze kwenyika uye kugadzira ramangwana rakakura pamwe chete.

Technical parameter

Carbon tetrafluoriori ndeye halogenated hydrocarbon ine makemikari formula cf4. Inogona kutariswa sehylenparated hydrocarbon, halogenated methane, perfluerocarbon, kana seyakagadzirwa inormaund. Carbon tetrafluoriori i gasi risina ruvara uye risina chinhu, kusakwana mumvura, soluble muBenzene uye chloroform. Yakasimba pasi petsvina yakajairika uye kumanikidzwa, dzivirira kusimba oxidants, zvinopisa kana zvinopisa zvinhu. Gasi risingaperi, kumanikidzwa kwemukati kwemudziyo kunowedzera kana kufumurwa nekupisa kwakanyanya, uye kune ngozi yekupaza uye kuputika. Izvo zvinogadziriswa nemakemikari uye zvisiri-zvinopisa. Chete mvura ambomoni-sodium ye simbi reagent inogona kushanda pamhepo tembiricha. Carbon tetrafluoriori i gasi rinokonzera iyo greenhouse maitiro. Iyo yakagadzikana kwazvo, inogona kugara mumamiriro ekunze kwenguva yakareba, uye igasi rine simba kwazvo gasi. Carbon tetrafluoriori inoshandiswa mumaplasma etching maitiro ematunhu akasiyana siyana ehuswa. Izvo zvinoshandiswawo seganda renhema, uye rinoshandiswa mune yakaderera-tembiricha dzinopfura, solvents, lubricants, zvinyorwa zvekusimbisa, uye zvinodzora zvevanozviviraniswa zvevanonzi vanoona. Ndiwo anoshandiswa zvakanyanya plasma etching gasi mune iyo micreilelectronics indasitiri. Iwo musanganiswa weTetrafluorluorhane yakakwirira-yekuchena gasi uye tetrafluorluorluorluorhane yakakwira-yekuchena gasi uye yakakwirira-yekuchena oxygen. Inogona kushandiswa zvakanyanya muSilicon, Silicon Dioxide, Silicon Nitride, uye phosphosilthe girazi. Kugadziriswa kwezvinhu zvakatetepa mafirimu senge tungsten uye tungsten zvakare inoshandiswa zvakanyanya mukucheneswa kwemagetsi, serwer tekinoroji, kuongororwa kwakaderera, uye kuongororwa kwekutora kwedunhu. Inoshandiswa seiyo yakaderera-tembiricha firiji uye plasma yakaoma etching tekinoroji yekubatanidzwa kwamatunhu. Kuchengetera zvekuchengetedza: Chengetedza mune inotonhorera, yakadonhedza isina-inosvibiswa gasi yekuchengetedza imba. Ramba kure nemoto uye kupisa masosi. Tembiricha yekuchengetedza haifanire kupfuura makumi matatu c. Inofanira kuchengetwa zvakasiyana kubva nyore nyore (inokanganisa) inopisa uye inokanganisa uye oxidants, uye dzivisa kusanganisa. Nzvimbo yekuchengetera inofanira kuve yakashongedzerwa nemidziyo yekurapa ekurumidzira ekurumidzira.

Chikumbiro:

Frorigerant:

Tetrafluor. Dzimwe nguva inoshandiswa seyakadzika tembiricha firiji.

② etching:

Iyo inoshandiswa mumagetsi microfrication yega kana musanganiswa neokisijeni se plasma etchant for silicon, silicon dioxide, uye silicon nitride.

Yakajairika package:

Mukana:

①Hwera kuchena, nzvimbo ichangoburwa;

②ICifiketi Gwaro Ragadzira;

Onganunurwa;

Žon-line quentis system yemhando yekudzora mudanho rega rega;

⑤HiGig inodikanwa uye meticulous chekuita yekubata cylinder usati wazadza;Nehunyanzvi hwepamusoro uye zvivakwa, mutengo wakasimba, mutengo unonzwisisika, wakazvimiririra kuendesa kune vatengi veCAFBon Simbisa nguva refu yekambani yekambani yekambani yerudo nevatengi uye vashandisi vese vakatenderedza nyika yese.
Kupisa Kutengesa kweChina cf4 uye cf4 gasi, Isu tinotarisa pakupa sevhisi vatengi vedu sechinhu chakakosha mukusimbisa hukama hwenyu kwenguva refu. Kuwanika kwedu nguva dzose kwezvinhu zvakakwirira zvegiredhi zvine musanganiswa neyedu yakanaka pre-kutengesa uye mushure mekutengesa-yekutengesa basa rinovimbisa kukwikwidza kwakasimba mumusika unowedzera pasi rose. Isu tinoda kushandira pamwe neshamwari dzebhizinesi kubva kumba uye kunze kwenyika uye kugadzira ramangwana rakakura pamwe chete.