Inopisa yekutengesa fekitori yakanyanya kuchena 99.999% kabhoni tetrafluoride cf4 gasi yeSimconductor Industry Etching

Zvino tava nemitezo yakawanda yeanokunda Ticharamba tichipa chigadzirwa nemhando yepamusoro uye yemakwikwi mutengo.
Iye zvino isu tine zvakawanda zvehupamhi vabati veVashandi Vashandisi vakanaka kwazvo pakushambadzira Internet, qc, uye kushanda nemhando dzemhando dzeshuwa dzinotambudza mukati meiyo nzira yekugadzira yeChina cf4 gasi uye kabhoni tetrafluoriori gasi, Mushure memakore ekuti 'tichigadzira uye kusimudzira, nezvakanakira matarenda anodzidziswa uye zvakapfuma kushambadzira chiitiko, kubudirira kwakanakisa kwakaitwa zvishoma nezvishoma. Isu tinowana mukurumbira wakanaka kubva kune vatengi nekuda kwezvinhu zvedu zvakanaka zvigadzirwa uye zvakanaka mushure-yekutengesa basa. Isu tine mwoyo nemwoyo wose kuumba ramangwana rakabudirira uye rinobudirira pamwe chete neshamwari dzese kumba uye kune dzimwe nyika!

Technical parameter

Carbon tetrafluoriori ndeye halogenated hydrocarbon ine makemikari formula cf4. Inogona kutariswa sehylenparated hydrocarbon, halogenated methane, perfluerocarbon, kana seyakagadzirwa inormaund. Carbon tetrafluoriori i gasi risina ruvara uye risina chinhu, kusakwana mumvura, soluble muBenzene uye chloroform. Yakasimba pasi petsvina yakajairika uye kumanikidzwa, dzivirira kusimba oxidants, zvinopisa kana zvinopisa zvinhu. Gasi risingaperi, kumanikidzwa kwemukati kwemudziyo kunowedzera kana kufumurwa nekupisa kwakanyanya, uye kune ngozi yekupaza uye kuputika. Izvo zvinogadziriswa nemakemikari uye zvisiri-zvinopisa. Chete mvura ambomoni-sodium ye simbi reagent inogona kushanda pamhepo tembiricha. Carbon tetrafluoriori i gasi rinokonzera iyo greenhouse maitiro. Iyo yakagadzikana kwazvo, inogona kugara mumamiriro ekunze kwenguva yakareba, uye igasi rine simba kwazvo gasi. Carbon tetrafluoriori inoshandiswa mumaplasma etching maitiro ematunhu akasiyana siyana ehuswa. Izvo zvinoshandiswawo seganda renhema, uye rinoshandiswa mune yakaderera-tembiricha dzinopfura, solvents, lubricants, zvinyorwa zvekusimbisa, uye zvinodzora zvevanozviviraniswa zvevanonzi vanoona. Ndiwo anoshandiswa zvakanyanya plasma etching gasi mune iyo micreilelectronics indasitiri. Iwo musanganiswa weTetrafluorluorhane yakakwirira-yekuchena gasi uye tetrafluorluorluorluorhane yakakwira-yekuchena gasi uye yakakwirira-yekuchena oxygen. Inogona kushandiswa zvakanyanya muSilicon, Silicon Dioxide, Silicon Nitride, uye phosphosilthe girazi. Kugadziriswa kwezvinhu zvakatetepa mafirimu senge tungsten uye tungsten zvakare inoshandiswa zvakanyanya mukucheneswa kwemagetsi, serwer tekinoroji, kuongororwa kwakaderera, uye kuongororwa kwekutora kwedunhu. Inoshandiswa seiyo yakaderera-tembiricha firiji uye plasma yakaoma etching tekinoroji yekubatanidzwa kwamatunhu. Kuchengetera zvekuchengetedza: Chengetedza mune inotonhorera, yakadonhedza isina-inosvibiswa gasi yekuchengetedza imba. Ramba kure nemoto uye kupisa masosi. Tembiricha yekuchengetedza haifanire kupfuura makumi matatu c. Inofanira kuchengetwa zvakasiyana kubva nyore nyore (inokanganisa) inopisa uye inokanganisa uye oxidants, uye dzivisa kusanganisa. Nzvimbo yekuchengetera inofanira kuve yakashongedzerwa nemidziyo yekurapa ekurumidzira ekurumidzira.

Chikumbiro:

Frorigerant:

Tetrafluor. Dzimwe nguva inoshandiswa seyakadzika tembiricha firiji.

② etching:

Iyo inoshandiswa mumagetsi microfrication yega kana musanganiswa neokisijeni se plasma etchant for silicon, silicon dioxide, uye silicon nitride.

Yakajairika package:

Mukana:

①Hwera kuchena, nzvimbo ichangoburwa;

②ICifiketi Gwaro Ragadzira;

Onganunurwa;

Žon-line quentis system yemhando yekudzora mudanho rega rega;

⑤HiGig inodikanwa uye meticulous chekuita yekubata cylinder usati wazadza;Zvino tava nemitezo yakawanda yeanokunda Ticharamba tichipa chigadzirwa nemhando yepamusoro uye yemakwikwi mutengo.
Inopisa yekutengesa fekitoriChina cf4 gasi uye kabhoni tetrafluoriori gasi, Mushure memakore ekuti 'tichigadzira uye kusimudzira, nezvakanakira matarenda anodzidziswa uye zvakapfuma kushambadzira chiitiko, kubudirira kwakanakisa kwakaitwa zvishoma nezvishoma. Isu tinowana mukurumbira wakanaka kubva kune vatengi nekuda kwezvinhu zvedu zvakanaka zvigadzirwa uye zvakanaka mushure-yekutengesa basa. Isu tine mwoyo nemwoyo wose kuumba ramangwana rakabudirira uye rinobudirira pamwe chete neshamwari dzese kumba uye kune dzimwe nyika!